ellipsometry

listen to the pronunciation of ellipsometry
İngilizce - Türkçe
Elipsometri
İngilizce - İngilizce
An optical technique for the investigation of the dielectric properties of thin films especially used in semiconductor manufacture
Ellipsometry is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films. It has applications in many different fields, from semiconductor physics to microelectronics and biology, from basic research to industrial applications. Ellipsometry is a very sensitive measurement technique and provides unequalled capabilities for thin film metrology. As an optical technique, spectroscopic ellipsometry is non-destructive and contactless
Ellipsometry is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films